Semiconductor Fabrication Equipment Cooling

AA-480-48-44 Air-to-Air

The AA-480-48-44 is an Air-to-Air thermoelectric assembly (TEA) that uses impingement flow to transfer heat. It offers dependable compact performance by cooling objects via convection. Heat is absorbed and dissipated through high density heat exchangers equipped with air ducted shrouds and brand name fans. The heat pumping action occurs from custom designed thermoelectric modules that achieve a high coefficient of performance (COP) to minimize power consumption.


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AA-480-24-44 Air-to-Air

The AA-480-24-44 is an Air-to-Air thermoelectric assembly (TEA) that uses impingement flow to transfer heat. It offers dependable compact performance by cooling objects via convection. Heat is absorbed and dissipated through high density heat exchangers equipped with air ducted shrouds and brand name fans. The heat pumping action occurs from custom designed thermoelectric modules that achieve a high coefficient of performance (COP) to minimize power consumption.


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AA-230-48-D44 Air-to-Air

The AA-230-48-D44 is an Air-to-Air thermoelectric assembly (TEA) that uses impingement flow to transfer heat. It offers dependable compact performance by cooling objects via convection. Heat is absorbed and dissipated through high density heat exchangers equipped with air ducted shrouds and brand name fans. The heat pumping action occurs from custom designed thermoelectric modules that achieve a high coefficient of performance (COP) to minimize power consumption.


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MRC300-DH2-DV Liquid Chiller

The MRC300-DH2-DV is a bench top re-circulating chiller that offers dependable, compact performance by controlling the temperature of a coolant in a liquid circuit. The coolant is re-circulated using a pump with high MTBF. Heat from coolant is absorbed by a heat exchanger and dissipated thru high density heat sinks equipped with brand name fans. The thermoelectric modules are custom designed to achieve long life operation. The unit is regulated with an easy to use digital temperature controller with push button interface.


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MRC150-DH2-DV Liquid Chiller

The MRC150-DH2-DV is a bench top re-circulating chiller that offers dependable, compact performance by controlling the temperature of a coolant in a liquid circuit. The coolant is re-circulated using a pump with high MTBF. Heat from coolant is absorbed by a heat exchanger and dissipated thru high density heat sinks equipped with brand name fans. The thermoelectric modules are custom designed to achieve long life operation. The unit is regulated with an easy to use digital temperature controller with push button interface.


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Industrial

The cooling capacity demands for industrial equipment such as industrial lasers, liquid chromatography, and semiconductor fabrication can vary from a couple of hundred Watts to hundreds of Kilowatts with required temperature control ranges from -80°C to +150°C.

Common Coolant Types and their Uses in Liquid Cooling Systems

Introduction

Using liquids for heat transfer is an important cooling method in many industries. Selection of the best heat transfer fluid for a cooling system involves consideration of performance, compatibility, and maintenance factors. Water has excellent heat transfer properties, making it somewhat of a standard for comparison to other coolant fluids. Among heat transfer fluids, water has superior properties in many regards, with a high specific heat of around 4,200 J/kgK, low viscosity, and no flash point.




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Liquid to Liquid Ambient Cooling Systems for Semiconductor Tools

Introduction

Cooling and temperature control systems are used throughout semiconductor fabrication facilities. In fabrication facilities both large and small, hundreds to thousands of cooling systems are installed and operate continuously. The processes employed are usually setup as copy-exact, which means the process systems are developed and transferred from the OEM of the process tool. These critical production tools used in semiconductor fabrication facilities are required to be reliable and easy to service to deliver minimum downtime.




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Thermal Management for Semiconductor Metrology Equipment

Introduction

The history of thin film semiconductor manufacturing has been one of constant process improvement. This constant process improvement was necessary in order to establish cost effective high yielding production lines as they struggled to keep pace with Moore’s law. All of this has been made possible through the integration of automated metrology systems with statistical process control. 




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