Cooling and temperature control systems are used throughout semiconductor fabrication facilities. In fabrication facilities both large and small, hundreds to thousands of cooling systems are installed and operate continuously. The processes employed are usually setup as copy-exact, which means the process systems are developed and transferred from the OEM of the process tool. These crtitical production tools used in a semiconductor fabrication facilities are required to be reliable and easy to service to deliver minimum downtime.
Semiconductor Fabrication Equipment Cooling