The history of thin film semiconductor manufacturing has been one of constant process improvement. This constant process improvement was necessary in order to establish cost effective high yielding production lines as they struggled to keep pace with Moore’s law. All of this has been made possible through the integration of automated metrology systems with statistical process control. Today, automated metrology systems are implemented throughout the manufacturing process. Since many of the properties of a thin film are also temperature dependent, temperature stability is key and thermal management is critical. In addition temperature control of the stages and other critical components is required for accurate and repeatable measurements over lengthy periods of time.