Semiconductor Fabrication Equipment

OEM Perspectives: Recirculating Chillers for Semiconductor Metrology & Inspection Systems

Introduction

Semiconductor metrology is critical in the semiconductor fabrication process. The complex nature of semiconductor fabrication now requires multiple test stages in between processing steps. Thin film semiconductor wafers are tested using several techniques including ellipsometry and reflectometry. Sophisticated optical equipment is used to inspect for defects as well as for accurate dimensional measurements. Manufacturers of optical inspection systems must integrate a thermal solution for temperature stabilization of optical components.




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Thermoelectric Chillers for Semiconductor Metrology & Inspection Systems

Introduction

The implementation of automated metrology systems has been a key to achieving cost effective semiconductor fabrication. The complex nature of semiconductor fabrication requires multiple tests between processing steps to inspect defects as well as measure dimensional properties including thickness, refractive index, resistivity and stress of the thin films. Because thermal noise can impact the image resolution of sensitive optical components in automated metrology systems, a thermal management system is required.




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AA-480-48-44 Air-to-Air

The AA-480-48-44 is an Air-to-Air thermoelectric assembly (TEA) that uses impingement flow to transfer heat. It offers dependable compact performance by cooling objects via convection. Heat is absorbed and dissipated through high density heat exchangers equipped with air ducted shrouds and brand name fans. The heat pumping action occurs from custom designed thermoelectric modules that achieve a high coefficient of performance (COP) to minimize power consumption.


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AA-480-24-44 Air-to-Air

The AA-480-24-44 is an Air-to-Air thermoelectric assembly (TEA) that uses impingement flow to transfer heat. It offers dependable compact performance by cooling objects via convection. Heat is absorbed and dissipated through high density heat exchangers equipped with air ducted shrouds and brand name fans. The heat pumping action occurs from custom designed thermoelectric modules that achieve a high coefficient of performance (COP) to minimize power consumption.


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AA-230-48-D44 Air-to-Air

The AA-230-48-D44 is an Air-to-Air thermoelectric assembly (TEA) that uses impingement flow to transfer heat. It offers dependable compact performance by cooling objects via convection. Heat is absorbed and dissipated through high density heat exchangers equipped with air ducted shrouds and brand name fans. The heat pumping action occurs from custom designed thermoelectric modules that achieve a high coefficient of performance (COP) to minimize power consumption.


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MRC300-DH2-DV Liquid Chiller

The MRC300-DH2-DV is a bench top re-circulating chiller that offers dependable, compact performance by controlling the temperature of a coolant in a liquid circuit. The coolant is re-circulated using a pump with high MTBF. Heat from coolant is absorbed by a heat exchanger and dissipated thru high density heat sinks equipped with brand name fans. The thermoelectric modules are custom designed to achieve long life operation. The unit is regulated with an easy to use digital temperature controller with push button interface.


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MRC150-DH2-DV Liquid Chiller

The MRC150-DH2-DV is a bench top re-circulating chiller that offers dependable, compact performance by controlling the temperature of a coolant in a liquid circuit. The coolant is re-circulated using a pump with high MTBF. Heat from coolant is absorbed by a heat exchanger and dissipated thru high density heat sinks equipped with brand name fans. The thermoelectric modules are custom designed to achieve long life operation. The unit is regulated with an easy to use digital temperature controller with push button interface.


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Semiconductor Metrology Equipment

The history of thin film semiconductor manufacturing has been one of constant process improvement. The key to cost effective production has been through implementation of automated metrology systems. Traditionally, metrology refers to measurement of any type of physical dimensions. In the film manufacturing industry automated metrology systems measure parameters such as thickness, refractive index, resistivity and stress of the thin films.

Industrial

Industrial-iconThe cooling capacity demands for industrial equipment, such as industrial lasers, liquid chromatography, and semiconductor fabrication, can vary from a couple of hundred Watts to hundreds of Kilowatts with required temperature control ranging from -80°C to +150°C.